Fabrication Equipment
Metal-Organic Chemical Vapor Deposition
( III-nitrides (GaN, AlN, InN, and their alloys )
Plasma Assisted Molecular Beam Epitaxy
( Ga, In, Al, N, Mg, Si, Sc )
Magnetron 3-target CO-Sputtering System
Using Au, Ag, Pt targets
Characterization Equipment
Micro-PhotoLuminescence System with 266nm & 405nm LASER
TCSPC
Lumerical FDTD , Mode, COMSOL Multiphysics
I-V, L-I, L-I-L, EL measurements
CIE 색좌표, Goniometer(각도별 측정)
Nano-scale wavength mapping
Keithley 2400 Sourcemeter
Photovoltaic Powermeter
300 W Xenon Lamp
1 kW Solar Simulator
Long-Term Reliability Testing
WizEIS - 1200 Premium
VersaSTAT 3
Analyzes H₂, O₂, and CO₂
Storage Equipment